研究報告32 - 1 総説 - Review
微粒子表面修飾・改質プロセスへのプラズマ技術の適用と機能性微粒子材料の創成
Application of plasma technologies to particle surface treatment systems and preparation of functionalized particle materials
阿部 孝之
富山大学水素同位体科学研究センター
930-8555 富山市五福3190
T. Abe
Hydrogen Isotope Research Center, University of Toyama 3190 Gofuku, Toyama 930-8555
Abstract
Particle surface modification of powdered materials has currently attracted considerable attention in various
industrial and scientific fields. However, conventional wet processes, such as plating and impregnation method,
produce wastewater streams containing potentially harmful residual chemicals. In addition, the wet processes
involve the decomposition of precursors by heating and chemical reduction, which interfere with controlled surface
modification. To avoid such drawbacks of wet processes, we have developed novel particle surface modification
methods based on the plasma technologies. In our original surface modification methods, a polygonal barrel
containing the powdered sample is rotated or oscillated to stir the particles during treatment, achieving the
uniform modification of the particle surfaces. Since plasma technologies used in our methods are categorized as
dry processes, they do not accompany wastewater discharge. Furthermore, the treatment in our methods is carried
out without heating or chemical reduction, allowing controlled surface modification. This report describes the
particle surface modification using the "polygonal barrel-sputtering method", "polygonal barrel-plasma chemical
vapor deposition method", and "polygonal barrel-plasma treatment method".