Akira Taguchia, Mitsuhiro Inouea, Chikako Hiromia, Masaaki Tanizawaa, Tomohito Kitamib and Takayuki Abea
aHydrogen Isotope Research Center, University of Toyama, Gofuku3190,Toyama 930-8555,Japan
bNippon Pillar Packing Co.,Ltd., 541-1, Uchiba, Shimouchigami, Sanda, Hyogo 669-1333, Japan
The transition of Pt from a nanoparticle to a film on SiO2 particles modified by the sputtering system with barrel-type powder sample holder(the barrel sputtering system). X-ray diffraction(XRD) and scanning electron microscopy(SEM) measurements reveal that the Pt nanoparticles grow in size with an increase in the duration of sputter deposition.The morphology of Pt changes from highly dispersed nanoparticles to a worm-like structure followed by a continuous Pt film, depending on the amount of Pt modified. Transmission electron microscopy(TEM) measurements reveal that the thin Pt film in the worm-like structure has a uniform thickness of approximately 2.6 nm, indicating film growth in a two-domensional mode followed by an island mode.
Key words: Barrel sputtering system, Surface coating, Environment friendly process